Semiconductor device and method for manufacturing the same | Patent Publication Number 20140246673

US 20140246673 A1
Patent NumberUS 09349874 B2
Application Number14278521
Filled DateMay 15, 2014
Priority DateOct 23, 2009
Publication DateSep 4, 2014
Inventor/ApplicantsToshinari Sasaki
Kengo Akimoto
International
1
H01L
National
1
257/43
Field of Search
0
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