MASK, SPACER PRODUCED BY USING THE MASK AND METHOD FOR PRODUCING SPACER USING THE MASK | Patent Publication Number 20160085104

US 20160085104 A1
Patent Number-
Application Number14801985
Filled DateJul 17, 2015
Priority DateJul 17, 2015
Publication DateMar 24, 2016
Original Assignee
Inventor/ApplicantsHongshu Zhang
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