Control of amplitude and phase of diffraction orders using polarizing targets and polarized illumination | Patent Publication Number 20180031470
US 20180031470 A1Publication DateFeb 1, 2018
Original AssigneeKla Corporation
Current AssigneeKla Corporation
Inventor/ApplicantsVladimir Levinski
See the invalidated claims, subscribe to our Concierge Program.
View Concierge ProgramEmpower your practice with Patexia Publication Prosecution IP Module.
Get access to our exclusive rankings and unlock powerful data.
Looking for a Publication Attorney?
Get in touch with our team or create your account to start exploring a
network of over 120K attorneys.