MEMS sensors with selectively adjusted damping of suspension | Patent Publication Number 20180179049

US 20180179049 A1
Patent NumberUS 10822225 B2
Application Number15643174
Filled DateJul 6, 2017
Priority DateDec 27, 2016
Publication DateJun 28, 2018
Original AssigneeHoneywell International
Current AssigneeHoneywell International
Inventor/ApplicantsMichael Schneider
Mikulas Jandak
Ulrich Schmid
International
3
H01L
B81C
B81B
National
0
Field of Search
0
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