End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum | Patent Publication Number 20200361094

US 20200361094 A1
Patent NumberUS 11515127 B2
Application Number15930924
Filled DateMay 13, 2020
Priority DateMay 14, 2019
Publication DateNov 19, 2020
Inventor/ApplicantsPeter J. Lembesis
Martin L. Zucker
Ryan M. Pakulski
International
3
H01L
H01J
B25J
National
0
Field of Search
0
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