PLASMA PROCESSING APPARATUS | Patent Publication Number 20210249233
US 20210249233 A1Publication DateAug 12, 2021
Original Assignee
Current AssigneeHitachi Hightech Instruments Co. Ltd
Inventor/ApplicantsMasahito Mori
Takao Arase
Hiroyuki Kajifusa
Kenetsu Yokogawa
Takao Arase
Hiroyuki Kajifusa
Kenetsu Yokogawa
International
2
H01J
H01L
National
0
Field of Search
0
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