PLASMA PROCESSING APPARATUS | Patent Publication Number 20210249233

US 20210249233 A1
Patent Number-
Application Number16980501
Filled DateDec 18, 2019
Priority DateDec 18, 2019
Publication DateAug 12, 2021
Original Assignee
Inventor/ApplicantsMasahito Mori
Takao Arase
Hiroyuki Kajifusa
Kenetsu Yokogawa
International
2
H01J
H01L
National
0
Field of Search
0
See the invalidated claims, subscribe to our Concierge Program.
View Concierge Program
Patent Prosecution report image

Empower your practice with Patexia Publication Prosecution IP Module.

Get access to our exclusive rankings and unlock powerful data.

Looking for a Publication Attorney?

Get in touch with our team or create your account to start exploring a network of over 120K attorneys.