Optical systems and methods of characterizing high-k dielectrics | Patent Publication Number 20220003678

US 20220003678 A1
Patent NumberUS 11808706 B2
Application Number17147371
Filled DateJan 12, 2021
Priority DateSep 3, 2015
Publication DateJan 6, 2022
Inventor/ApplicantsPhilippe C. Adell
Harry A. Atwater
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