METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE | Patent Publication Number 20220085066

US 20220085066 A1
Patent Number-
Application Number17459856
Filled DateAug 27, 2021
Priority DateAug 27, 2021
Publication DateMar 17, 2022
Original AssigneeKioxia Corporation
Current AssigneeKioxia Corporation
Inventor/ApplicantsMasayuki KITAMURA
Hiroshi TOYODA
Katsuaki NATORI
Koji YAMAKAWA
Takayuki BEPPU
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