Cycloheptatriene molybdenum (0) precursors for deposition of molybdenum films | Patent Publication Number 20220220607
US 20220220607 A1Patent NumberUS 11530477 B2
Application Number17146890
Filled DateJan 12, 2021
Priority DateJan 12, 2021
Publication DateJul 14, 2022
Original AssigneeApplied Materials Inc.
National University Of Management
National University Of Management
Current AssigneeNational University Of Management
Inventor/ApplicantsNemanja Dordevic
Paul Mehlmann
Han Vinh Huynh
Andrea Leoncini
Doreen Wei Ying Yong
Paul Mehlmann
Han Vinh Huynh
Andrea Leoncini
Doreen Wei Ying Yong
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