Spacer Features For Nanosheet-Based Devices | Patent Publication Number 20220328648

US 20220328648 A1
Patent Number-
Application Number17465259
Filled DateSep 2, 2021
Priority DateApr 9, 2021
Publication DateOct 13, 2022
Original Assignee
Current AssigneeTaiwan Semiconductor Manufacturing Company
Inventor/ApplicantsTzu-Hua Chiu
Wei-Han Fan
I-Hsieh Wong
Chia-Pin Lin
Alex Lee
Wei-Yang Lee
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