SEMICONDUCTOR STRUCTURE HAVING SELF-ALIGNED CONDUCTIVE STRUCTURE AND METHOD FOR FORMING THE SEMICONDUCTOR STRUCTURE | Patent Publication Number 20230063438
US 20230063438 A1Publication DateMar 2, 2023
Original AssigneeTaiwan Semiconductor Manufacturing Company
Current AssigneeTaiwan Semiconductor Manufacturing Company
Inventor/ApplicantsShao-Kuan LEE
Ting-Ya LO
Hsin-Yen HUANG
Cherng-Shiaw TSAI
Hsiao-Kang CHANG
Chi-Lin TENG
Cheng-Chin LEE
Shau-Lin SHUE
Ting-Ya LO
Hsin-Yen HUANG
Cherng-Shiaw TSAI
Hsiao-Kang CHANG
Chi-Lin TENG
Cheng-Chin LEE
Shau-Lin SHUE
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