Reducing substrate surface scratching using machine learning | Patent Publication Number 20230121513
US 20230121513 A1Patent NumberUS 11835927 B2
Application Number18068469
Filled DateDec 19, 2022
Priority DateJun 28, 2021
Publication DateApr 20, 2023
Original AssigneeApplied Materials Inc.
Current AssigneeApplied Materials Israel
Inventor/ApplicantsWenjing Xu
Feng Chen
Adolph Miller Allen
Kartik B. Shah
Michael Sterling Jackson
Weize Hu
Mitrabhanu Sahu
Karthik Ramanathan
Xinyuan Chong
Kartik B Shah
Karthikeyan Balaraman
Satish Radhakrishnan
Feng Chen
Adolph Miller Allen
Kartik B. Shah
Michael Sterling Jackson
Weize Hu
Mitrabhanu Sahu
Karthik Ramanathan
Xinyuan Chong
Kartik B Shah
Karthikeyan Balaraman
Satish Radhakrishnan
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