METHOD FOR CLEANING ELECTROSTATIC CHUCK | Patent Publication Number 20230343628
US 20230343628 A1Publication DateOct 26, 2023
Original AssigneeTaiwan Semiconductor Manufacturing Company
Current AssigneeTaiwan Semiconductor Manufacturing Company
Inventor/ApplicantsChi-Hung LIAO
Yueh-Lin YANG
Yueh-Lin YANG
International
3
B08B
H01L
C23C
National
0
Field of Search
0
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