Apparatus using charged particle beams | Patent Publication Number 20230411110

US 20230411110 A1
Patent NumberUS 11961697 B2
Application Number18144131
Filled DateMay 5, 2023
Priority DateOct 2, 2017
Publication DateDec 21, 2023
Original AssigneeAsml Holding
Current AssigneeAsml Netherlands B.v.
Inventor/ApplicantsZhong-wei CHEN
Zhong-Wei Chen
Xuedong LIU
Xuedong Liu
Xuerang HU
Weiming REN
Weiming Ren
Xuerang Hu
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