METHODS AND APPARATUS FOR THE CLOSED-LOOP FEEDBACK CONTROL OF THE PRINTING OF A MULTILAYER PATTERN | Patent Publication Number 20130102103

US 20130102103 A1
Patent Number-
Application Number13658648
Filled DateOct 23, 2012
Priority DateApr 27, 2012
Publication DateApr 25, 2013
Original AssigneeApplied Materials Inc.
Current AssigneeApplied Materials Inc.
Inventor/Applicants
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