FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION | Patent Publication Number 20200090909

US 20200090909 A1

Patent Number-

Application Number16692158

Filled DateNov 22, 2019

Priority DateMay 16, 2016

Publication DateMar 19, 2020

Original AssigneeVarian Medical Systems Inc.

Current AssigneeVarian Medical Systems Inc.

Inventor/ApplicantsJohn Hautala
Simon Ruffell

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