TECHNIQUES AND APPARATUS FOR ELONGATION PATTERNING USING ANGLED ION BEAMS | Patent Publication Number 20210375626

US 20210375626 A1

Patent Number-

Application Number17404438

Filled DateAug 17, 2021

Priority DateMay 18, 2018

Publication DateDec 2, 2021

Original AssigneeVarian Medical Systems Inc.

Current AssigneeVarian Medical Systems Inc.

Inventor/ApplicantsSimon Ruffell
Kevin R. Anglin

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