SEMICONDUCTOR MANUFACTURING DEVICE WITH EMBEDDED FLUID CONDUITS | Patent Publication Number 20220080504

US 20220080504 A1
Patent Number-
Application Number17538563
Filled DateNov 30, 2021
Priority DateApr 21, 2015
Publication DateMar 17, 2022
Original AssigneeVarian Medical Systems Inc.
Current AssigneeVarian Medical Systems Inc.
Inventor/ApplicantsJordan B. Tye
Joshua M. Abeshaus
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