DEPOSITION APPARATUS, METHOD OF DEPOSITION ON A SUBSTRATE, SUBSTRATE STRUCTURE AND SUBSTRATE SUPPORT | Patent Publication Number 20220157629

US 20220157629 A1
Patent Number-
Application Number17440149
Filled DateMar 19, 2019
Priority DateMar 19, 2019
Publication DateMay 19, 2022
Original Assignee
Current AssigneeApplied Materials Inc.
Inventor/ApplicantsMarco GALIAZZO
Francesca ANTONIOLLI
Marco D'ACUNZO
Daniel HADA
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