USE OF MAGNETIC ELEMENTS TO SHAPE AND DEFOCUS CHARGED PARTICLE BEAMS | Patent Publication Number 20220304136

US 20220304136 A1
Patent Number-
Application Number17204657
Filled DateMar 17, 2021
Priority DateMar 17, 2021
Publication DateSep 22, 2022
Original Assignee
Inventor/ApplicantsJoshua McNEUR
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