THIN FILM DEPOSITION METHOD AND METHOD OF FABRICATING ELECTRONIC DEVICE USING THE SAME | Patent Publication Number 20230227972

US 20230227972 A1
Patent Number-
Application Number18155549
Filled DateJan 17, 2023
Priority DateJan 17, 2023
Publication DateJul 20, 2023
Original Assignee
Current AssigneeNational Taiwan University Of Science And Technology
Sk Hynix
Inventor/ApplicantsEun Soo KIM
Do Han LEE
Han-Bo-Ram LEE
Abu Saad Aqueel Ahmed ANSARI
Tae Hwan LIM
Seung Wook RYU
Ngoc le TRINH
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