TECHNIQUES FOR CONTROLLING PRECURSORS IN CHEMICAL DEPOSITION PROCESSES | Patent Publication Number 20230323540

US 20230323540 A1
Patent Number-
Application Number18208084
Filled DateJun 9, 2023
Priority DateDec 29, 2017
Publication DateOct 12, 2023
Original AssigneeVarian Medical Systems Inc.
Current AssigneeVarian Medical Systems Inc.
Inventor/ApplicantsVijay VENUGOPAL
Jonathan BAKKE
Elaina BABAYAN
Sarah WHITE
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