Laser device for exposure apparatus | Patent Publication Number 20120236885

US 20120236885 A1
Patent NumberUS 09257809 B2
Application Number13401734
Filled DateFeb 21, 2012
Priority DateFeb 18, 2011
Publication DateSep 20, 2012
Original AssigneeGigaphoton Inc.
Current AssigneeGigaphoton Inc.
Inventor/ApplicantsOsamu Wakabayashi
Hiroshi Tanaka
Hidenori Watanabe
Hiroshi TANAKA
Osamu WAKABAYASHI
Hidenori WATANABE
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