Methods for manufacturing semiconductor devices | Patent Publication Number 20140170837

US 20140170837 A1
Patent NumberUS 09117777 B2
Application Number14106699
Filled DateDec 13, 2013
Priority DateDec 13, 2013
Publication DateJun 19, 2014
Original AssigneeImec
Current AssigneeImec
Inventor/ApplicantsBenjamin Vincent
Geert Eneman
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