Methods and apparatuses to form self-aligned caps | Patent Publication Number 20190393157
US 20190393157 A1Publication DateDec 26, 2019
Original AssigneeIntel Corporation
Current AssigneeDaedalus Prime Llc
Inventor/ApplicantsBoyan Boyanov
Kanwal Jit SINGH
Kanwal Jit Singh
Boyan BOYANOV
Kanwal Jit SINGH
Kanwal Jit Singh
Boyan BOYANOV
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