Techniques for controlling precursors in chemical deposition processes | Patent Publication Number 20200399758
US 20200399758 A1Patent NumberUS 11718914 B2
Application Number17012980
Filled DateSep 4, 2020
Priority DateDec 29, 2017
Publication DateDec 24, 2020
Original AssigneeVarian Medical Systems Inc.
Current AssigneeVarian Medical Systems Inc.
Inventor/ApplicantsElaina Babayan
Sarah White
Vijay Venugopal
Jonathan Bakke
Sarah White
Vijay Venugopal
Jonathan Bakke
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