Discrete time loop based thermal control | Patent Publication Number 20220091646

US 20220091646 A1
Patent NumberUS 11934239 B2
Application Number17543542
Filled DateDec 6, 2021
Priority DateJul 31, 2018
Publication DateMar 24, 2022
Original AssigneeTaiwan Semiconductor Manufacturing Company
Current AssigneeTaiwan Semiconductor Manufacturing Company
Inventor/ApplicantsAllen Timothy Chang
Tsung-Tsun Chen
Jui-Cheng HUANG
Yi-Hsing Hsiao
Yu-Jie Huang
Jui-Cheng Huang
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