Folded waveguide phase shifters | Patent Publication Number 20220373854

US 20220373854 A1
Patent NumberUS 11914265 B2
Application Number17881434
Filled DateAug 4, 2022
Priority DateAug 17, 2018
Publication DateNov 24, 2022
Original AssigneeTaiwan Semiconductor Manufacturing Company
Current AssigneeTaiwan Semiconductor Manufacturing Company
Inventor/ApplicantsChewn-Pu Jou
Feng-Wei Kuo
Huan-Neng Chen
Lan-Chou Cho
Lan-Chou CHO
Feng-Wei KUO
Chewn-Pu JOU
Huan-Neng CHEN
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