Film forming method and film forming apparatus | Patent Publication Number 20230135342

US 20230135342 A1

Patent NumberUS 11915914 B2

Application Number18051097

Filled DateOct 31, 2022

Priority DateOct 31, 2022

Publication DateMay 4, 2023

Original AssigneeTokyo Electron Limited

Current AssigneeTokyo Electron Limited

Inventor/ApplicantsHiroki Murakami
Hiroki MURAKAMI
Sena FUJITA
Sena Fujita

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