Ceramic showerheads with conductive electrodes | Patent Publication Number 20230203657
US 20230203657 A1Patent NumberUS 11834744 B2
Application Number18173704
Filled DateFeb 23, 2023
Priority DateJan 11, 2019
Publication DateJun 29, 2023
Original AssigneeApplied Materials Inc.
Current AssigneeApplied Materials Israel
Inventor/ApplicantsLaksheswar Kalita
Tien Fak Tan
Saravjeet Singh
LokKee Loh
Soonam Park
Dmitry Lubomirsky
Tae Won Kim
Tien Fak Tan
Saravjeet Singh
LokKee Loh
Soonam Park
Dmitry Lubomirsky
Tae Won Kim
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