High temperature bipolar electrostatic chuck | Patent Publication Number 20230207371

US 20230207371 A1
Patent NumberUS 11901209 B2
Application Number18172217
Filled DateFeb 21, 2023
Priority DateOct 21, 2020
Publication DateJun 29, 2023
Original AssigneeApplied Materials Inc.
Current AssigneeApplied Materials Israel
Inventor/ApplicantsJian LI
Zheng J. YE
Jian Li
Dmitry A. DZILNO
Zheng J. Ye
Juan Carlos ROCHA-ALVAREZ
Juan Carlos Rocha-Alvarez
Dmitry A. Dzilno
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