Inspection apparatus and inspection method | Patent Publication Number 20230349843

US 20230349843 A1

Patent NumberUS 11927554 B2

Application Number18350054

Filled DateJul 11, 2023

Priority DateMar 31, 2022

Publication DateNov 2, 2023

Original AssigneeCanon Inc.

Current AssigneeCanon Anelva Corporation

Inventor/ApplicantsTakeo Tsukamoto
Takeo TSUKAMOTO

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