Eugene Barash Barash > Papers
Paper Listing
| Journal: | |
1. E. Barash, Broadband Microlithography: Process Development using PROLITH Simulator. "Proc. SPIE": August 1997; Vol. 3083: 82-90. | |
| Conference: | |
1. E. Barash, Moving Toward Multivariate Statistical Process Control in Semiconductor Manufacturing. "Advanced Process Control Conference, APC-2015": October 2015; | |
2. E. Barash, Practical Limits of Excimer Laser Lithography. "16th International Conference "Laser Optics",": Jun 2014; | |