Search

Charlie Sun

Examiner (ID: 6808, Phone: (571)270-5100 , Office: P/2196 )

Most Active Art Unit
2196
Art Unit(s)
2196
Total Applications
600
Issued Applications
513
Pending Applications
45
Abandoned Applications
41

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18135812 [patent_doc_number] => 11561482 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-01-24 [patent_title] => Methods and apparatus for reducing hydrogen permeation from lithographic tool [patent_app_type] => utility [patent_app_number] => 17/351964 [patent_app_country] => US [patent_app_date] => 2021-06-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 19 [patent_no_of_words] => 6961 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17351964 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/351964
Methods and apparatus for reducing hydrogen permeation from lithographic tool Jun 17, 2021 Issued
Array ( [id] => 18135812 [patent_doc_number] => 11561482 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-01-24 [patent_title] => Methods and apparatus for reducing hydrogen permeation from lithographic tool [patent_app_type] => utility [patent_app_number] => 17/351964 [patent_app_country] => US [patent_app_date] => 2021-06-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 19 [patent_no_of_words] => 6961 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17351964 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/351964
Methods and apparatus for reducing hydrogen permeation from lithographic tool Jun 17, 2021 Issued
Array ( [id] => 18154435 [patent_doc_number] => 11567412 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-01-31 [patent_title] => Single current source with local fine tuning for multi beam laser imaging module in a lithography printing system [patent_app_type] => utility [patent_app_number] => 17/345643 [patent_app_country] => US [patent_app_date] => 2021-06-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6656 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17345643 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/345643
Single current source with local fine tuning for multi beam laser imaging module in a lithography printing system Jun 10, 2021 Issued
Array ( [id] => 17098482 [patent_doc_number] => 20210286273 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-16 [patent_title] => DROPLET CATCHER, DROPLET CATCHER SYSTEM OF EUV LITHOGRAPHY APPARATUS, AND MAINTENANCE METHOD OF THE EUV LITHOGRAPHY APPARATUS [patent_app_type] => utility [patent_app_number] => 17/336249 [patent_app_country] => US [patent_app_date] => 2021-06-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9922 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17336249 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/336249
Droplet catcher, droplet catcher system of EUV lithography apparatus, and maintenance method of the EUV lithography apparatus May 31, 2021 Issued
Array ( [id] => 18826340 [patent_doc_number] => 11841614 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-12 [patent_title] => Exposure apparatus, exposure method, and article manufacturing method [patent_app_type] => utility [patent_app_number] => 17/336022 [patent_app_country] => US [patent_app_date] => 2021-06-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 22 [patent_figures_cnt] => 43 [patent_no_of_words] => 11237 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 299 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17336022 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/336022
Exposure apparatus, exposure method, and article manufacturing method May 31, 2021 Issued
Array ( [id] => 17260462 [patent_doc_number] => 20210373447 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-02 [patent_title] => OPTICAL DEVICE, AND METHOD FOR PREVENTING CONTAMINATION OF OPTICAL DEVICE [patent_app_type] => utility [patent_app_number] => 17/329042 [patent_app_country] => US [patent_app_date] => 2021-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6129 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17329042 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/329042
Optical device, and method for preventing contamination of optical device May 23, 2021 Issued
Array ( [id] => 17589136 [patent_doc_number] => 11327403 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-05-10 [patent_title] => Illumination optical system for projection lithography [patent_app_type] => utility [patent_app_number] => 17/317112 [patent_app_country] => US [patent_app_date] => 2021-05-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 5025 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17317112 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/317112
Illumination optical system for projection lithography May 10, 2021 Issued
Array ( [id] => 18407243 [patent_doc_number] => 20230168595 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-01 [patent_title] => ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES [patent_app_type] => utility [patent_app_number] => 17/922593 [patent_app_country] => US [patent_app_date] => 2021-05-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14712 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17922593 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/922593
ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES May 10, 2021 Pending
Array ( [id] => 17891930 [patent_doc_number] => 11454895 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-09-27 [patent_title] => Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder [patent_app_type] => utility [patent_app_number] => 17/313054 [patent_app_country] => US [patent_app_date] => 2021-05-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 19 [patent_no_of_words] => 10271 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17313054 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/313054
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder May 5, 2021 Issued
Array ( [id] => 17898807 [patent_doc_number] => 20220308469 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-29 [patent_title] => WAFER EDGE EXPOSURE APPARATUS, WAFER EDGE EXPOSURE METHOD AND PHOTOLITHOGRAPHY DEVICE [patent_app_type] => utility [patent_app_number] => 17/593206 [patent_app_country] => US [patent_app_date] => 2021-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5543 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 213 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17593206 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/593206
Wafer edge exposure apparatus, wafer edge exposure method and photolithography device Apr 29, 2021 Issued
Array ( [id] => 17621104 [patent_doc_number] => 11340152 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-05-24 [patent_title] => Substrate processing apparatus, substrate processing system, and substrate processing method [patent_app_type] => utility [patent_app_number] => 17/245220 [patent_app_country] => US [patent_app_date] => 2021-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 12476 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 202 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17245220 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/245220
Substrate processing apparatus, substrate processing system, and substrate processing method Apr 29, 2021 Issued
Array ( [id] => 17985912 [patent_doc_number] => 20220351949 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-03 [patent_title] => DIRECT LIFT CATHODE FOR LITHOGRAPHY MASK CHAMBER [patent_app_type] => utility [patent_app_number] => 17/242685 [patent_app_country] => US [patent_app_date] => 2021-04-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6701 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17242685 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/242685
Direct lift cathode for lithography mask chamber Apr 27, 2021 Issued
Array ( [id] => 18340151 [patent_doc_number] => 20230132100 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-27 [patent_title] => METHOD OF FABRICATING MICRO-NANO STRUCTURE [patent_app_type] => utility [patent_app_number] => 17/997102 [patent_app_country] => US [patent_app_date] => 2021-04-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4785 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17997102 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/997102
Method of fabricating micro-nano structure Apr 27, 2021 Issued
Array ( [id] => 16993631 [patent_doc_number] => 20210232051 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-29 [patent_title] => METHOD FOR ADUSTING A FIRST ELEMENT OF A LITHOGRAPHY APPARATUS TOWARDS A SECOND ELEMENT OF A LITHOGRAPHY APPARATUS BY A TUNABLE SPACER [patent_app_type] => utility [patent_app_number] => 17/228150 [patent_app_country] => US [patent_app_date] => 2021-04-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9037 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17228150 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/228150
Method for adusting a first element of a lithography apparatus towards a second element of a lithography apparatus by a tunable spacer Apr 11, 2021 Issued
Array ( [id] => 17491810 [patent_doc_number] => 11281109 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-03-22 [patent_title] => Configuring optical layers in imprint lithography processes [patent_app_type] => utility [patent_app_number] => 17/222492 [patent_app_country] => US [patent_app_date] => 2021-04-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 21 [patent_no_of_words] => 7951 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17222492 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/222492
Configuring optical layers in imprint lithography processes Apr 4, 2021 Issued
Array ( [id] => 18710858 [patent_doc_number] => 20230333487 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-19 [patent_title] => SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD [patent_app_type] => utility [patent_app_number] => 17/914903 [patent_app_country] => US [patent_app_date] => 2021-04-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14952 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17914903 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/914903
SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD Mar 31, 2021 Pending
Array ( [id] => 17915186 [patent_doc_number] => 20220317582 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => WAFER EDGE EXPOSURE METHOD, WAFER EDGE EXPOSURE DEVICE AND MASK [patent_app_type] => utility [patent_app_number] => 17/310764 [patent_app_country] => US [patent_app_date] => 2021-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3316 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17310764 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/310764
WAFER EDGE EXPOSURE METHOD, WAFER EDGE EXPOSURE DEVICE AND MASK Mar 22, 2021 Pending
Array ( [id] => 17809093 [patent_doc_number] => 20220260928 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-18 [patent_title] => Method and Apparatus for EUV Mask Inspection [patent_app_type] => utility [patent_app_number] => 17/210185 [patent_app_country] => US [patent_app_date] => 2021-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6496 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17210185 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/210185
Method and apparatus for EUV mask inspection Mar 22, 2021 Issued
Array ( [id] => 17876960 [patent_doc_number] => 11448970 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-09-20 [patent_title] => Lithography system and methods [patent_app_type] => utility [patent_app_number] => 17/209590 [patent_app_country] => US [patent_app_date] => 2021-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 28 [patent_no_of_words] => 14658 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17209590 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/209590
Lithography system and methods Mar 22, 2021 Issued
Array ( [id] => 16949809 [patent_doc_number] => 20210208500 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-08 [patent_title] => PELLICLE AND PELLICLE ASSEMBLY [patent_app_type] => utility [patent_app_number] => 17/206649 [patent_app_country] => US [patent_app_date] => 2021-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 40505 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17206649 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/206649
Pellicle and pellicle assembly Mar 18, 2021 Issued
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