
Daniel D. Chang
Examiner (ID: 9281, Phone: (571)272-1801 , Office: P/2844 )
| Most Active Art Unit | 2844 |
| Art Unit(s) | 2844, 0, 2819 |
| Total Applications | 2537 |
| Issued Applications | 2319 |
| Pending Applications | 103 |
| Abandoned Applications | 143 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 7433444
[patent_doc_number] => 20040194710
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-10-07
[patent_title] => 'Apparatus for vapor deposition'
[patent_app_type] => new
[patent_app_number] => 10/696519
[patent_app_country] => US
[patent_app_date] => 2003-10-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 4193
[patent_no_of_claims] => 15
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 144
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0194/20040194710.pdf
[firstpage_image] =>[orig_patent_app_number] => 10696519
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/696519 | Apparatus for vapor deposition | Oct 28, 2003 | Issued |
Array
(
[id] => 7143001
[patent_doc_number] => 20040168642
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-09-02
[patent_title] => 'Film deposition system'
[patent_app_type] => new
[patent_app_number] => 10/685415
[patent_app_country] => US
[patent_app_date] => 2003-10-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 8
[patent_no_of_words] => 4498
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 45
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0168/20040168642.pdf
[firstpage_image] =>[orig_patent_app_number] => 10685415
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/685415 | Film deposition system | Oct 15, 2003 | Abandoned |
Array
(
[id] => 6909146
[patent_doc_number] => 20050172904
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-08-11
[patent_title] => 'Plasma processing apparatus and plasma processing method'
[patent_app_type] => utility
[patent_app_number] => 10/675966
[patent_app_country] => US
[patent_app_date] => 2003-10-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 10
[patent_no_of_words] => 8598
[patent_no_of_claims] => 5
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0172/20050172904.pdf
[firstpage_image] =>[orig_patent_app_number] => 10675966
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/675966 | Plasma processing apparatus and plasma processing method | Oct 1, 2003 | Issued |
Array
(
[id] => 8374756
[patent_doc_number] => 08257546
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2012-09-04
[patent_title] => 'Method and system for monitoring an etch process'
[patent_app_type] => utility
[patent_app_number] => 10/674568
[patent_app_country] => US
[patent_app_date] => 2003-09-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 18
[patent_figures_cnt] => 25
[patent_no_of_words] => 11143
[patent_no_of_claims] => 37
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 196
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 10674568
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/674568 | Method and system for monitoring an etch process | Sep 28, 2003 | Issued |
Array
(
[id] => 7113803
[patent_doc_number] => 20050067103
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-03-31
[patent_title] => 'Interferometer endpoint monitoring device'
[patent_app_type] => utility
[patent_app_number] => 10/672420
[patent_app_country] => US
[patent_app_date] => 2003-09-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 3290
[patent_no_of_claims] => 22
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0067/20050067103.pdf
[firstpage_image] =>[orig_patent_app_number] => 10672420
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/672420 | Interferometer endpoint monitoring device | Sep 25, 2003 | Abandoned |
Array
(
[id] => 7202266
[patent_doc_number] => 20050257740
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-11-24
[patent_title] => 'Electronic component burning jig'
[patent_app_type] => utility
[patent_app_number] => 10/528389
[patent_app_country] => US
[patent_app_date] => 2003-09-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 2
[patent_no_of_words] => 11835
[patent_no_of_claims] => 22
[patent_no_of_ind_claims] => 10
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0257/20050257740.pdf
[firstpage_image] =>[orig_patent_app_number] => 10528389
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/528389 | Electronic component burning jig | Sep 10, 2003 | Abandoned |
Array
(
[id] => 7411109
[patent_doc_number] => 20040159354
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-08-19
[patent_title] => 'Applications for closed-loop motor control'
[patent_app_type] => new
[patent_app_number] => 10/652720
[patent_app_country] => US
[patent_app_date] => 2003-08-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 22
[patent_figures_cnt] => 22
[patent_no_of_words] => 8336
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 79
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0159/20040159354.pdf
[firstpage_image] =>[orig_patent_app_number] => 10652720
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/652720 | Applications for closed-loop motor control | Aug 27, 2003 | Abandoned |
Array
(
[id] => 693591
[patent_doc_number] => 07070661
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2006-07-04
[patent_title] => 'Uniform gas cushion wafer support'
[patent_app_type] => utility
[patent_app_number] => 10/646249
[patent_app_country] => US
[patent_app_date] => 2003-08-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 5
[patent_no_of_words] => 1248
[patent_no_of_claims] => 9
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 186
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/070/07070661.pdf
[firstpage_image] =>[orig_patent_app_number] => 10646249
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/646249 | Uniform gas cushion wafer support | Aug 21, 2003 | Issued |
Array
(
[id] => 518387
[patent_doc_number] => 07186298
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2007-03-06
[patent_title] => 'Wafer support system'
[patent_app_type] => utility
[patent_app_number] => 10/642799
[patent_app_country] => US
[patent_app_date] => 2003-08-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 14
[patent_figures_cnt] => 19
[patent_no_of_words] => 8552
[patent_no_of_claims] => 8
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 125
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/186/07186298.pdf
[firstpage_image] =>[orig_patent_app_number] => 10642799
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/642799 | Wafer support system | Aug 17, 2003 | Issued |
Array
(
[id] => 6969101
[patent_doc_number] => 20050034811
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-02-17
[patent_title] => 'Sensor array for measuring plasma characteristics in plasma processing enviroments'
[patent_app_type] => utility
[patent_app_number] => 10/640892
[patent_app_country] => US
[patent_app_date] => 2003-08-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 14
[patent_figures_cnt] => 14
[patent_no_of_words] => 8682
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0034/20050034811.pdf
[firstpage_image] =>[orig_patent_app_number] => 10640892
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/640892 | Sensor array for measuring plasma characteristics in plasma processing environments | Aug 13, 2003 | Issued |
Array
(
[id] => 6968950
[patent_doc_number] => 20050034660
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-02-17
[patent_title] => 'Alignment means for chamber closure to reduce wear on surfaces'
[patent_app_type] => utility
[patent_app_number] => 10/639077
[patent_app_country] => US
[patent_app_date] => 2003-08-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 12
[patent_figures_cnt] => 12
[patent_no_of_words] => 3621
[patent_no_of_claims] => 32
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0034/20050034660.pdf
[firstpage_image] =>[orig_patent_app_number] => 10639077
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/639077 | Alignment means for chamber closure to reduce wear on surfaces | Aug 10, 2003 | Abandoned |
Array
(
[id] => 7033287
[patent_doc_number] => 20050031796
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-02-10
[patent_title] => 'Method and apparatus for controlling spatial distribution of RF power and plasma density'
[patent_app_type] => utility
[patent_app_number] => 10/636154
[patent_app_country] => US
[patent_app_date] => 2003-08-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 3105
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0031/20050031796.pdf
[firstpage_image] =>[orig_patent_app_number] => 10636154
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/636154 | Method and apparatus for controlling spatial distribution of RF power and plasma density | Aug 6, 2003 | Abandoned |
Array
(
[id] => 7333020
[patent_doc_number] => 20040188321
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-09-30
[patent_title] => 'WAFER HOLDER FOR SEMICONDUCTOR MANUFACTURING DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE IN WHICH IT IS INSTALLED'
[patent_app_type] => new
[patent_app_number] => 10/604514
[patent_app_country] => US
[patent_app_date] => 2003-07-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 2
[patent_no_of_words] => 7163
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 55
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0188/20040188321.pdf
[firstpage_image] =>[orig_patent_app_number] => 10604514
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/604514 | WAFER HOLDER FOR SEMICONDUCTOR MANUFACTURING DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE IN WHICH IT IS INSTALLED | Jul 27, 2003 | Abandoned |
Array
(
[id] => 7415688
[patent_doc_number] => 20040182322
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-09-23
[patent_title] => 'WAFER HOLDER FOR SEMICONDUCTOR MANUFACTURING DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE IN WHICH IT IS INSTALLED'
[patent_app_type] => new
[patent_app_number] => 10/604512
[patent_app_country] => US
[patent_app_date] => 2003-07-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 2
[patent_no_of_words] => 6608
[patent_no_of_claims] => 5
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 53
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0182/20040182322.pdf
[firstpage_image] =>[orig_patent_app_number] => 10604512
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/604512 | WAFER HOLDER FOR SEMICONDUCTOR MANUFACTURING DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE IN WHICH IT IS INSTALLED | Jul 27, 2003 | Abandoned |
Array
(
[id] => 7385608
[patent_doc_number] => 20040016403
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-01-29
[patent_title] => 'Apparatus and a method for forming an alloy layer over a substrate'
[patent_app_type] => new
[patent_app_number] => 10/628949
[patent_app_country] => US
[patent_app_date] => 2003-07-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 3795
[patent_no_of_claims] => 11
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 195
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0016/20040016403.pdf
[firstpage_image] =>[orig_patent_app_number] => 10628949
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/628949 | Apparatus and a method for forming an alloy layer over a substrate | Jul 27, 2003 | Issued |
Array
(
[id] => 130443
[patent_doc_number] => 07699934
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2010-04-20
[patent_title] => 'Epitaxial wafer production apparatus and susceptor structure'
[patent_app_type] => utility
[patent_app_number] => 10/626675
[patent_app_country] => US
[patent_app_date] => 2003-07-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 17
[patent_figures_cnt] => 18
[patent_no_of_words] => 9016
[patent_no_of_claims] => 4
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 218
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/699/07699934.pdf
[firstpage_image] =>[orig_patent_app_number] => 10626675
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/626675 | Epitaxial wafer production apparatus and susceptor structure | Jul 24, 2003 | Issued |
Array
(
[id] => 7022290
[patent_doc_number] => 20050016684
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-01-27
[patent_title] => 'Process kit for erosion resistance enhancement'
[patent_app_type] => utility
[patent_app_number] => 10/627213
[patent_app_country] => US
[patent_app_date] => 2003-07-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 2871
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0016/20050016684.pdf
[firstpage_image] =>[orig_patent_app_number] => 10627213
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/627213 | Process kit for erosion resistance enhancement | Jul 24, 2003 | Abandoned |
Array
(
[id] => 7025679
[patent_doc_number] => 20050020073
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-01-27
[patent_title] => 'Method and system for electronic spatial filtering of spectral reflectometer optical signals'
[patent_app_type] => utility
[patent_app_number] => 10/625243
[patent_app_country] => US
[patent_app_date] => 2003-07-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 6957
[patent_no_of_claims] => 23
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0020/20050020073.pdf
[firstpage_image] =>[orig_patent_app_number] => 10625243
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/625243 | Method and system for electronic spatial filtering of spectral reflectometer optical signals | Jul 21, 2003 | Abandoned |
Array
(
[id] => 7222006
[patent_doc_number] => 20040072426
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-04-15
[patent_title] => 'Process chamber for manufacturing a smiconductor device'
[patent_app_type] => new
[patent_app_number] => 10/620589
[patent_app_country] => US
[patent_app_date] => 2003-07-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 2
[patent_no_of_words] => 2010
[patent_no_of_claims] => 5
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 163
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0072/20040072426.pdf
[firstpage_image] =>[orig_patent_app_number] => 10620589
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/620589 | Process chamber for manufacturing a smiconductor device | Jul 16, 2003 | Abandoned |
Array
(
[id] => 7376614
[patent_doc_number] => 20040035366
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-02-26
[patent_title] => 'Heating crucible and deposition apparatus using the same'
[patent_app_type] => new
[patent_app_number] => 10/619512
[patent_app_country] => US
[patent_app_date] => 2003-07-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 3187
[patent_no_of_claims] => 33
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 65
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0035/20040035366.pdf
[firstpage_image] =>[orig_patent_app_number] => 10619512
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/619512 | Heating crucible and deposition apparatus using the same | Jul 15, 2003 | Issued |