Wayne A. Lambert

Array ( [id] => 6969101 [patent_doc_number] => 20050034811 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-02-17 [patent_title] => 'Sensor array for measuring plasma characteristics in plasma processing enviroments' [patent_app_type] => utility [patent_app_number] => 10/640892 [patent_app_country] => US [patent_app_date] => 2003-08-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 8682 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0034/20050034811.pdf [firstpage_image] =>[orig_patent_app_number] => 10640892 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6968950 [patent_doc_number] => 20050034660 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-02-17 [patent_title] => 'Alignment means for chamber closure to reduce wear on surfaces' [patent_app_type] => utility [patent_app_number] => 10/639077 [patent_app_country] => US [patent_app_date] => 2003-08-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 3621 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0034/20050034660.pdf [firstpage_image] =>[orig_patent_app_number] => 10639077 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7033287 [patent_doc_number] => 20050031796 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-02-10 [patent_title] => 'Method and apparatus for controlling spatial distribution of RF power and plasma density' [patent_app_type] => utility [patent_app_number] => 10/636154 [patent_app_country] => US [patent_app_date] => 2003-08-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3105 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0031/20050031796.pdf [firstpage_image] =>[orig_patent_app_number] => 10636154 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7385608 [patent_doc_number] => 20040016403 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-01-29 [patent_title] => 'Apparatus and a method for forming an alloy layer over a substrate' [patent_app_type] => new [patent_app_number] => 10/628949 [patent_app_country] => US [patent_app_date] => 2003-07-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3795 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0016/20040016403.pdf [firstpage_image] =>[orig_patent_app_number] => 10628949 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7333020 [patent_doc_number] => 20040188321 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-30 [patent_title] => 'WAFER HOLDER FOR SEMICONDUCTOR MANUFACTURING DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE IN WHICH IT IS INSTALLED' [patent_app_type] => new [patent_app_number] => 10/604514 [patent_app_country] => US [patent_app_date] => 2003-07-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 7163 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 55 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0188/20040188321.pdf [firstpage_image] =>[orig_patent_app_number] => 10604514 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7415688 [patent_doc_number] => 20040182322 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-23 [patent_title] => 'WAFER HOLDER FOR SEMICONDUCTOR MANUFACTURING DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE IN WHICH IT IS INSTALLED' [patent_app_type] => new [patent_app_number] => 10/604512 [patent_app_country] => US [patent_app_date] => 2003-07-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 6608 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 53 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0182/20040182322.pdf [firstpage_image] =>[orig_patent_app_number] => 10604512 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 130443 [patent_doc_number] => 07699934 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-04-20 [patent_title] => 'Epitaxial wafer production apparatus and susceptor structure' [patent_app_type] => utility [patent_app_number] => 10/626675 [patent_app_country] => US [patent_app_date] => 2003-07-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 18 [patent_no_of_words] => 9016 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 218 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/699/07699934.pdf [firstpage_image] =>[orig_patent_app_number] => 10626675 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7022290 [patent_doc_number] => 20050016684 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-01-27 [patent_title] => 'Process kit for erosion resistance enhancement' [patent_app_type] => utility [patent_app_number] => 10/627213 [patent_app_country] => US [patent_app_date] => 2003-07-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2871 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0016/20050016684.pdf [firstpage_image] =>[orig_patent_app_number] => 10627213 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7025679 [patent_doc_number] => 20050020073 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-01-27 [patent_title] => 'Method and system for electronic spatial filtering of spectral reflectometer optical signals' [patent_app_type] => utility [patent_app_number] => 10/625243 [patent_app_country] => US [patent_app_date] => 2003-07-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6957 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0020/20050020073.pdf [firstpage_image] =>[orig_patent_app_number] => 10625243 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7222006 [patent_doc_number] => 20040072426 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-04-15 [patent_title] => 'Process chamber for manufacturing a smiconductor device' [patent_app_type] => new [patent_app_number] => 10/620589 [patent_app_country] => US [patent_app_date] => 2003-07-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 2010 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 163 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0072/20040072426.pdf [firstpage_image] =>[orig_patent_app_number] => 10620589 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7376614 [patent_doc_number] => 20040035366 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-02-26 [patent_title] => 'Heating crucible and deposition apparatus using the same' [patent_app_type] => new [patent_app_number] => 10/619512 [patent_app_country] => US [patent_app_date] => 2003-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3187 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0035/20040035366.pdf [firstpage_image] =>[orig_patent_app_number] => 10619512 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7119630 [patent_doc_number] => 20050011459 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-01-20 [patent_title] => 'Chemical vapor deposition reactor' [patent_app_type] => utility [patent_app_number] => 10/621049 [patent_app_country] => US [patent_app_date] => 2003-07-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 7239 [patent_no_of_claims] => 160 [patent_no_of_ind_claims] => 55 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0011/20050011459.pdf [firstpage_image] =>[orig_patent_app_number] => 10621049 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7331625 [patent_doc_number] => 20040187789 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-30 [patent_title] => 'WAFER HOLDER FOR SEMICONDUCTOR MANUFACTURING DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE IN WHICH IT IS INSTALLED' [patent_app_type] => new [patent_app_number] => 10/604133 [patent_app_country] => US [patent_app_date] => 2003-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 6692 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0187/20040187789.pdf [firstpage_image] =>[orig_patent_app_number] => 10604133 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7212050 [patent_doc_number] => 20050252884 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-11-17 [patent_title] => 'Method and system for predicting process performance using material processing tool and sensor data' [patent_app_type] => utility [patent_app_number] => 10/517762 [patent_app_country] => US [patent_app_date] => 2003-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 8055 [patent_no_of_claims] => 36 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0252/20050252884.pdf [firstpage_image] =>[orig_patent_app_number] => 10517762 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 62690 [patent_doc_number] => 07758699 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-07-20 [patent_title] => 'Apparatus for and method of continuous HTS tape buffer layer deposition using large scale ion beam assisted deposition' [patent_app_type] => utility [patent_app_number] => 10/609250 [patent_app_country] => US [patent_app_date] => 2003-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6697 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 274 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/758/07758699.pdf [firstpage_image] =>[orig_patent_app_number] => 10609250 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7398910 [patent_doc_number] => 20040261707 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-12-30 [patent_title] => 'Apparatus for and method of cooling and positioning a translating substrate tape for use with a continuous vapor deposition process' [patent_app_type] => new [patent_app_number] => 10/609236 [patent_app_country] => US [patent_app_date] => 2003-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4779 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0261/20040261707.pdf [firstpage_image] =>[orig_patent_app_number] => 10609236 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7214946 [patent_doc_number] => 20040154543 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-08-12 [patent_title] => 'WAFER HOLDER FOR SEMICONDUCTOR MANUFACTURING DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE IN WHICH IT IS INSTALLED' [patent_app_type] => new [patent_app_number] => 10/604065 [patent_app_country] => US [patent_app_date] => 2003-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 6382 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0154/20040154543.pdf [firstpage_image] =>[orig_patent_app_number] => 10604065 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7185720 [patent_doc_number] => 20040083978 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-05-06 [patent_title] => 'Double slit-valve doors for plasma processing' [patent_app_type] => new [patent_app_number] => 10/602491 [patent_app_country] => US [patent_app_date] => 2003-06-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 5196 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0083/20040083978.pdf [firstpage_image] =>[orig_patent_app_number] => 10602491 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7451408 [patent_doc_number] => 20040118516 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-06-24 [patent_title] => 'Plasma parameter control using learning data' [patent_app_type] => new [patent_app_number] => 10/462932 [patent_app_country] => US [patent_app_date] => 2003-06-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4137 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0118/20040118516.pdf [firstpage_image] =>[orig_patent_app_number] => 10462932 [rel_patent_id] =>[rel_patent_doc_number] =>)