Methods for manufacturing semiconductor devices | Patent Number 09117777

US 09117777 B2
Application Number14106699
Publication NumberUS 20140170837 A1
Pendency1 year, 8 months, 15 days
Filled DateDec 13, 2013
Priority DateDec 13, 2013
Publication DateJun 19, 2014
Expiration DateDec 12, 2033
Inventor/ApplicantsGeert Eneman
Benjamin Vincent
ExaminesPATERSON, BRIGITTE A
Art Unit2812
Technology Center2800
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Imec
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Imec
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