Laser device for exposure apparatus | Patent Number 09257809
US 09257809 B2Filled DateFeb 21, 2012
Priority DateFeb 18, 2011
Publication DateSep 20, 2012
Expiration DateFeb 17, 2031
Inventor/ApplicantsOsamu Wakabayashi
Hidenori Watanabe
Hiroshi Tanaka
Osamu WAKABAYASHI
Hiroshi TANAKA
Hidenori WATANABE
Hidenori Watanabe
Hiroshi Tanaka
Osamu WAKABAYASHI
Hiroshi TANAKA
Hidenori WATANABE
ExaminesVAN ROY, TOD THOMAS
Art Unit2828
Technology Center2800
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