Laser device for exposure apparatus | Patent Number 09257809

US 09257809 B2
Application Number13401734
Publication NumberUS 20120236885 A1
Pendency3 years, 11 months, 24 days
Filled DateFeb 21, 2012
Priority DateFeb 18, 2011
Publication DateSep 20, 2012
Expiration DateFeb 17, 2031
Inventor/ApplicantsOsamu Wakabayashi
Hidenori Watanabe
Hiroshi Tanaka
Osamu WAKABAYASHI
Hiroshi TANAKA
Hidenori WATANABE
ExaminesVAN ROY, TOD THOMAS
Art Unit2828
Technology Center2800
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