Methods and apparatuses to form self-aligned caps | Patent Number 10727183
US 10727183 B2Filled DateSep 3, 2019
Priority DateNov 4, 2011
Publication DateDec 26, 2019
Expiration DateNov 3, 2031
Inventor/ApplicantsBoyan BOYANOV
Boyan Boyanov
Kanwal Jit Singh
Kanwal Jit SINGH
Boyan Boyanov
Kanwal Jit Singh
Kanwal Jit SINGH
ExaminesGALVIN III, JOSEPH M
Art Unit2898
Technology Center2800
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