Techniques for controlling precursors in chemical deposition processes | Patent Number 11718914

US 11718914 B2
Application Number17012980
Publication NumberUS 20200399758 A1
Pendency2 years, 11 months, 8 days
Filled DateSep 4, 2020
Priority DateDec 29, 2017
Publication DateDec 24, 2020
Expiration DateDec 28, 2037
Inventor/ApplicantsVijay Venugopal
Sarah White
Elaina Babayan
Jonathan Bakke
ExaminesRHODES-VIVOUR, TEMILADE S
Art Unit2858
Technology Center2800
Assignments
Varian Medical Systems Inc.
Current
Varian Medical Systems Inc.
Original
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