Ceramic showerheads with conductive electrodes | Patent Number 11834744

US 11834744 B2
Application Number18173704
Publication NumberUS 20230203657 A1
Pendency9 months, 15 days
Filled DateFeb 23, 2023
Priority DateJan 11, 2019
Publication DateJun 29, 2023
Expiration DateJan 10, 2039
Inventor/ApplicantsLaksheswar Kalita
LokKee Loh
Dmitry Lubomirsky
Tien Fak Tan
Soonam Park
Saravjeet Singh
Tae Won Kim
ExaminesZERVIGON, RUDY
Art Unit1716
Technology Center1700
Assignments
Applied Materials Israel
Current
Applied Materials IsraelApplied Materials Inc.
Original
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