High temperature bipolar electrostatic chuck | Patent Number 11901209

US 11901209 B2
Application Number18172217
Publication NumberUS 20230207371 A1
Pendency11 months, 27 days
Filled DateFeb 21, 2023
Priority DateOct 21, 2020
Publication DateJun 29, 2023
Expiration DateOct 20, 2040
Inventor/ApplicantsJian Li
Jian LI
Juan Carlos ROCHA-ALVAREZ
Zheng J. YE
Dmitry A. DZILNO
Juan Carlos Rocha-Alvarez
Dmitry A. Dzilno
Zheng J. Ye
ExaminesJACKSON, STEPHEN W
Art Unit2836
Technology Center2800
Assignments
Applied Materials Israel
Current
Applied Materials IsraelApplied Materials Inc.
Original
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