Film forming method and film forming apparatus | Patent Number 11915914

US 11915914 B2
Application Number18051097
Publication NumberUS 20230135342 A1
Pendency1 year, 3 months, 29 days
Filled DateOct 31, 2022
Priority DateOct 31, 2022
Publication DateMay 4, 2023
Expiration DateOct 30, 2042
Inventor/ApplicantsHiroki Murakami
Hiroki MURAKAMI
Sena FUJITA
Sena Fujita
ExaminesHERNANDEZ-KENNEY, JOSE
Art Unit1717
Technology Center1700
Assignments
Tokyo Electron Limited
Current
Tokyo Electron Limited
Original
Law Firm
You must be logged in to view
Login
Attorneys
Subscription-Only
View Concierge Program
Patent Prosecution report image

Empower your practice with Patexia Publication Prosecution IP Module.

Get access to our exclusive rankings and unlock powerful data.
Check our Latest ReportPurchase IP Module

Looking for a Publication Attorney?

Get in touch with our team or create your account to start exploring a network of over 120K attorneys.