Inspection apparatus and inspection method | Patent Number 11927554

US 11927554 B2
Application Number18350054
Publication NumberUS 20230349843 A1
Pendency8 months, 5 days
Filled DateJul 11, 2023
Priority DateMar 31, 2022
Publication DateNov 2, 2023
Expiration DateMar 30, 2042
Inventor/ApplicantsTakeo Tsukamoto
Takeo TSUKAMOTO
ExaminesSONG, HOON K
Art Unit2884
Technology Center2800
Assignments
Canon Anelva Corporation
Current
Canon Anelva CorporationCanon Inc.
Original
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